JPS5721831B2 - - Google Patents
Info
- Publication number
- JPS5721831B2 JPS5721831B2 JP4254574A JP4254574A JPS5721831B2 JP S5721831 B2 JPS5721831 B2 JP S5721831B2 JP 4254574 A JP4254574 A JP 4254574A JP 4254574 A JP4254574 A JP 4254574A JP S5721831 B2 JPS5721831 B2 JP S5721831B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Particle Accelerators (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4254574A JPS5721831B2 (enExample) | 1974-04-16 | 1974-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4254574A JPS5721831B2 (enExample) | 1974-04-16 | 1974-04-16 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22336582A Division JPS58117871A (ja) | 1982-12-20 | 1982-12-20 | イオン注入装置 |
| JP22336682A Division JPS58117872A (ja) | 1982-12-20 | 1982-12-20 | イオン注入方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50140798A JPS50140798A (enExample) | 1975-11-12 |
| JPS5721831B2 true JPS5721831B2 (enExample) | 1982-05-10 |
Family
ID=12639017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4254574A Expired JPS5721831B2 (enExample) | 1974-04-16 | 1974-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5721831B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58117872A (ja) * | 1982-12-20 | 1983-07-13 | Toshiba Corp | イオン注入方法 |
| JPS58117871A (ja) * | 1982-12-20 | 1983-07-13 | Toshiba Corp | イオン注入装置 |
| JPS61124568A (ja) * | 1984-11-16 | 1986-06-12 | Matsushita Electric Ind Co Ltd | イオンビ−ムスパツタ装置 |
| JPS61197700U (enExample) * | 1985-05-31 | 1986-12-10 |
-
1974
- 1974-04-16 JP JP4254574A patent/JPS5721831B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50140798A (enExample) | 1975-11-12 |