JPS5721321Y2 - - Google Patents
Info
- Publication number
- JPS5721321Y2 JPS5721321Y2 JP1975177148U JP17714875U JPS5721321Y2 JP S5721321 Y2 JPS5721321 Y2 JP S5721321Y2 JP 1975177148 U JP1975177148 U JP 1975177148U JP 17714875 U JP17714875 U JP 17714875U JP S5721321 Y2 JPS5721321 Y2 JP S5721321Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Coating Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1975177148U JPS5721321Y2 (de) | 1975-12-26 | 1975-12-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1975177148U JPS5721321Y2 (de) | 1975-12-26 | 1975-12-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5288968U JPS5288968U (de) | 1977-07-02 |
JPS5721321Y2 true JPS5721321Y2 (de) | 1982-05-08 |
Family
ID=28655459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1975177148U Expired JPS5721321Y2 (de) | 1975-12-26 | 1975-12-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5721321Y2 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5813222B2 (ja) * | 1978-06-20 | 1983-03-12 | 富士プラント工業株式会社 | 薄板状基板へ均一に被膜を形成する方法および装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5018759A (de) * | 1973-06-26 | 1975-02-27 | ||
JPS5093775A (de) * | 1973-12-19 | 1975-07-26 |
-
1975
- 1975-12-26 JP JP1975177148U patent/JPS5721321Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5018759A (de) * | 1973-06-26 | 1975-02-27 | ||
JPS5093775A (de) * | 1973-12-19 | 1975-07-26 |
Also Published As
Publication number | Publication date |
---|---|
JPS5288968U (de) | 1977-07-02 |