JPS5721321Y2 - - Google Patents

Info

Publication number
JPS5721321Y2
JPS5721321Y2 JP1975177148U JP17714875U JPS5721321Y2 JP S5721321 Y2 JPS5721321 Y2 JP S5721321Y2 JP 1975177148 U JP1975177148 U JP 1975177148U JP 17714875 U JP17714875 U JP 17714875U JP S5721321 Y2 JPS5721321 Y2 JP S5721321Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975177148U
Other languages
Japanese (ja)
Other versions
JPS5288968U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975177148U priority Critical patent/JPS5721321Y2/ja
Publication of JPS5288968U publication Critical patent/JPS5288968U/ja
Application granted granted Critical
Publication of JPS5721321Y2 publication Critical patent/JPS5721321Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Coating Apparatus (AREA)
  • Weting (AREA)
JP1975177148U 1975-12-26 1975-12-26 Expired JPS5721321Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975177148U JPS5721321Y2 (de) 1975-12-26 1975-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975177148U JPS5721321Y2 (de) 1975-12-26 1975-12-26

Publications (2)

Publication Number Publication Date
JPS5288968U JPS5288968U (de) 1977-07-02
JPS5721321Y2 true JPS5721321Y2 (de) 1982-05-08

Family

ID=28655459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975177148U Expired JPS5721321Y2 (de) 1975-12-26 1975-12-26

Country Status (1)

Country Link
JP (1) JPS5721321Y2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5813222B2 (ja) * 1978-06-20 1983-03-12 富士プラント工業株式会社 薄板状基板へ均一に被膜を形成する方法および装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018759A (de) * 1973-06-26 1975-02-27
JPS5093775A (de) * 1973-12-19 1975-07-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018759A (de) * 1973-06-26 1975-02-27
JPS5093775A (de) * 1973-12-19 1975-07-26

Also Published As

Publication number Publication date
JPS5288968U (de) 1977-07-02

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