JPS57210596A - Microwave discharge light source - Google Patents

Microwave discharge light source

Info

Publication number
JPS57210596A
JPS57210596A JP9618181A JP9618181A JPS57210596A JP S57210596 A JPS57210596 A JP S57210596A JP 9618181 A JP9618181 A JP 9618181A JP 9618181 A JP9618181 A JP 9618181A JP S57210596 A JPS57210596 A JP S57210596A
Authority
JP
Japan
Prior art keywords
light source
discharge light
microwave discharge
microwave
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9618181A
Other languages
Japanese (ja)
Inventor
Hitoshi Kodama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9618181A priority Critical patent/JPS57210596A/en
Publication of JPS57210596A publication Critical patent/JPS57210596A/en
Pending legal-status Critical Current

Links

JP9618181A 1981-06-22 1981-06-22 Microwave discharge light source Pending JPS57210596A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9618181A JPS57210596A (en) 1981-06-22 1981-06-22 Microwave discharge light source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9618181A JPS57210596A (en) 1981-06-22 1981-06-22 Microwave discharge light source

Publications (1)

Publication Number Publication Date
JPS57210596A true JPS57210596A (en) 1982-12-24

Family

ID=14158140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9618181A Pending JPS57210596A (en) 1981-06-22 1981-06-22 Microwave discharge light source

Country Status (1)

Country Link
JP (1) JPS57210596A (en)

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