JPS57210556A - Power supply for ion pump - Google Patents

Power supply for ion pump

Info

Publication number
JPS57210556A
JPS57210556A JP9519881A JP9519881A JPS57210556A JP S57210556 A JPS57210556 A JP S57210556A JP 9519881 A JP9519881 A JP 9519881A JP 9519881 A JP9519881 A JP 9519881A JP S57210556 A JPS57210556 A JP S57210556A
Authority
JP
Japan
Prior art keywords
ion pump
invertor
electric discharge
switching
discharge current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9519881A
Other languages
Japanese (ja)
Other versions
JPS5854465B2 (en
Inventor
Shigenobu Kanayama
Kazumi Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOUHOKU KINZOKU KOGYO KK
Tokin Corp
Original Assignee
TOUHOKU KINZOKU KOGYO KK
Tohoku Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOUHOKU KINZOKU KOGYO KK, Tohoku Metal Industries Ltd filed Critical TOUHOKU KINZOKU KOGYO KK
Priority to JP9519881A priority Critical patent/JPS5854465B2/en
Publication of JPS57210556A publication Critical patent/JPS57210556A/en
Publication of JPS5854465B2 publication Critical patent/JPS5854465B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To make it possible to supply an ion pump with a proper voltage commensurate to the electric discharge current value and make use of a small sized, lightweight unit as a transformer, by installing a control circuit capable of controlling the drive time range of a switching element, while providing for an ion pump such voltage that may correspond to electric discharge current values of the ion pump. CONSTITUTION:Corresponding to the detecting value of a detection circuit 40, a control circuit 50 which controls a drive time range of the said switching transistor inside an invertor 30 is installed and it is so designed as to provide for an ion pump 10 such voltage as commensurate to its electric discharge current value, permitting it to do high frequency switching by means of the invertor 30 in addition. When switching about 2kHz by the invertor 30, frequency works out at about 400 times or about 330 times over a sine wave of 50 or 60Hz. If working magnetic flux density level is made to be equivalent to the conventional low frequency transformer T1, a sectional area is able to become 1/400 or 1/330 so that transformer T2 may be considerably miniaturized.
JP9519881A 1981-06-22 1981-06-22 Power supply for ion pump Expired JPS5854465B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9519881A JPS5854465B2 (en) 1981-06-22 1981-06-22 Power supply for ion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9519881A JPS5854465B2 (en) 1981-06-22 1981-06-22 Power supply for ion pump

Publications (2)

Publication Number Publication Date
JPS57210556A true JPS57210556A (en) 1982-12-24
JPS5854465B2 JPS5854465B2 (en) 1983-12-05

Family

ID=14131048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9519881A Expired JPS5854465B2 (en) 1981-06-22 1981-06-22 Power supply for ion pump

Country Status (1)

Country Link
JP (1) JPS5854465B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053157U (en) * 1983-09-20 1985-04-15 日本電子株式会社 ion pump power supply
JPS6485577A (en) * 1987-05-29 1989-03-30 Anelva Corp Power supply for sputter ion pump
EP0337530A2 (en) * 1988-04-14 1989-10-18 VARIAN S.p.A. Improved electronic feeder for an ion pump
KR100455369B1 (en) * 1997-06-30 2005-05-24 삼성전자주식회사 Power supply device and signal transmission method of ion implantation facility
JP2015095378A (en) * 2013-11-13 2015-05-18 株式会社日立ハイテクノロジーズ High-voltage generation circuit, and ion pump employing the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053157U (en) * 1983-09-20 1985-04-15 日本電子株式会社 ion pump power supply
JPS6485577A (en) * 1987-05-29 1989-03-30 Anelva Corp Power supply for sputter ion pump
EP0337530A2 (en) * 1988-04-14 1989-10-18 VARIAN S.p.A. Improved electronic feeder for an ion pump
JPH01307153A (en) * 1988-04-14 1989-12-12 Varian Spa Improved electron supply line for ion pump
JPH0586024B2 (en) * 1988-04-14 1993-12-09 Varian Spa
KR100455369B1 (en) * 1997-06-30 2005-05-24 삼성전자주식회사 Power supply device and signal transmission method of ion implantation facility
JP2015095378A (en) * 2013-11-13 2015-05-18 株式会社日立ハイテクノロジーズ High-voltage generation circuit, and ion pump employing the same

Also Published As

Publication number Publication date
JPS5854465B2 (en) 1983-12-05

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