JPS57203546U - - Google Patents

Info

Publication number
JPS57203546U
JPS57203546U JP9272281U JP9272281U JPS57203546U JP S57203546 U JPS57203546 U JP S57203546U JP 9272281 U JP9272281 U JP 9272281U JP 9272281 U JP9272281 U JP 9272281U JP S57203546 U JPS57203546 U JP S57203546U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9272281U
Other languages
Japanese (ja)
Other versions
JPS6319321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981092722U priority Critical patent/JPS6319321Y2/ja
Publication of JPS57203546U publication Critical patent/JPS57203546U/ja
Application granted granted Critical
Publication of JPS6319321Y2 publication Critical patent/JPS6319321Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1981092722U 1981-06-22 1981-06-22 Expired JPS6319321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981092722U JPS6319321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-06-22 1981-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981092722U JPS6319321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-06-22 1981-06-22

Publications (2)

Publication Number Publication Date
JPS57203546U true JPS57203546U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-12-24
JPS6319321Y2 JPS6319321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-30

Family

ID=29887737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981092722U Expired JPS6319321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-06-22 1981-06-22

Country Status (1)

Country Link
JP (1) JPS6319321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010235A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-06-01 1975-02-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010235A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-06-01 1975-02-01

Also Published As

Publication number Publication date
JPS6319321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-30

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