JPS57203453U - - Google Patents
Info
- Publication number
- JPS57203453U JPS57203453U JP9184081U JP9184081U JPS57203453U JP S57203453 U JPS57203453 U JP S57203453U JP 9184081 U JP9184081 U JP 9184081U JP 9184081 U JP9184081 U JP 9184081U JP S57203453 U JPS57203453 U JP S57203453U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981091840U JPS6328857Y2 (en:Method) | 1981-06-22 | 1981-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981091840U JPS6328857Y2 (en:Method) | 1981-06-22 | 1981-06-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57203453U true JPS57203453U (en:Method) | 1982-12-24 |
| JPS6328857Y2 JPS6328857Y2 (en:Method) | 1988-08-03 |
Family
ID=29886909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981091840U Expired JPS6328857Y2 (en:Method) | 1981-06-22 | 1981-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6328857Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019016857A1 (ja) * | 2017-07-18 | 2019-01-24 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5246756A (en) * | 1975-10-11 | 1977-04-13 | Hitachi Ltd | Field-emission type electron gun |
-
1981
- 1981-06-22 JP JP1981091840U patent/JPS6328857Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5246756A (en) * | 1975-10-11 | 1977-04-13 | Hitachi Ltd | Field-emission type electron gun |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019016857A1 (ja) * | 2017-07-18 | 2019-01-24 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置 |
| US10973112B2 (en) | 2017-07-18 | 2021-04-06 | Hitachi High-Tech Corporation | Charged particle beam device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6328857Y2 (en:Method) | 1988-08-03 |