JPS57203453U - - Google Patents

Info

Publication number
JPS57203453U
JPS57203453U JP9184081U JP9184081U JPS57203453U JP S57203453 U JPS57203453 U JP S57203453U JP 9184081 U JP9184081 U JP 9184081U JP 9184081 U JP9184081 U JP 9184081U JP S57203453 U JPS57203453 U JP S57203453U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9184081U
Other languages
Japanese (ja)
Other versions
JPS6328857Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981091840U priority Critical patent/JPS6328857Y2/ja
Publication of JPS57203453U publication Critical patent/JPS57203453U/ja
Application granted granted Critical
Publication of JPS6328857Y2 publication Critical patent/JPS6328857Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1981091840U 1981-06-22 1981-06-22 Expired JPS6328857Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981091840U JPS6328857Y2 (cs) 1981-06-22 1981-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981091840U JPS6328857Y2 (cs) 1981-06-22 1981-06-22

Publications (2)

Publication Number Publication Date
JPS57203453U true JPS57203453U (cs) 1982-12-24
JPS6328857Y2 JPS6328857Y2 (cs) 1988-08-03

Family

ID=29886909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981091840U Expired JPS6328857Y2 (cs) 1981-06-22 1981-06-22

Country Status (1)

Country Link
JP (1) JPS6328857Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019016857A1 (ja) * 2017-07-18 2019-01-24 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246756A (en) * 1975-10-11 1977-04-13 Hitachi Ltd Field-emission type electron gun

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246756A (en) * 1975-10-11 1977-04-13 Hitachi Ltd Field-emission type electron gun

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019016857A1 (ja) * 2017-07-18 2019-01-24 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置
US10973112B2 (en) 2017-07-18 2021-04-06 Hitachi High-Tech Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPS6328857Y2 (cs) 1988-08-03

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