JPS57200030U - - Google Patents
Info
- Publication number
- JPS57200030U JPS57200030U JP8920181U JP8920181U JPS57200030U JP S57200030 U JPS57200030 U JP S57200030U JP 8920181 U JP8920181 U JP 8920181U JP 8920181 U JP8920181 U JP 8920181U JP S57200030 U JPS57200030 U JP S57200030U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8920181U JPH0138911Y2 (cs) | 1981-06-16 | 1981-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8920181U JPH0138911Y2 (cs) | 1981-06-16 | 1981-06-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57200030U true JPS57200030U (cs) | 1982-12-20 |
| JPH0138911Y2 JPH0138911Y2 (cs) | 1989-11-21 |
Family
ID=29884351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8920181U Expired JPH0138911Y2 (cs) | 1981-06-16 | 1981-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0138911Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59143328A (ja) * | 1983-02-03 | 1984-08-16 | Anelva Corp | ドライエツチング装置 |
-
1981
- 1981-06-16 JP JP8920181U patent/JPH0138911Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59143328A (ja) * | 1983-02-03 | 1984-08-16 | Anelva Corp | ドライエツチング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0138911Y2 (cs) | 1989-11-21 |