JPS57199815U - - Google Patents
Info
- Publication number
- JPS57199815U JPS57199815U JP8780081U JP8780081U JPS57199815U JP S57199815 U JPS57199815 U JP S57199815U JP 8780081 U JP8780081 U JP 8780081U JP 8780081 U JP8780081 U JP 8780081U JP S57199815 U JPS57199815 U JP S57199815U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Recording Measured Values (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981087800U JPS6316972Y2 (https=) | 1981-06-15 | 1981-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981087800U JPS6316972Y2 (https=) | 1981-06-15 | 1981-06-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57199815U true JPS57199815U (https=) | 1982-12-18 |
| JPS6316972Y2 JPS6316972Y2 (https=) | 1988-05-13 |
Family
ID=29882996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981087800U Expired JPS6316972Y2 (https=) | 1981-06-15 | 1981-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6316972Y2 (https=) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4979785A (https=) * | 1972-11-15 | 1974-08-01 | ||
| JPS52127770A (en) * | 1976-04-19 | 1977-10-26 | Fujitsu Ltd | Spatter etching method |
| JPS53116076A (en) * | 1977-03-22 | 1978-10-11 | Hitachi Ltd | Plasma processing method and its unit |
| JPS54131865A (en) * | 1978-04-03 | 1979-10-13 | Nec Corp | Wafer scribing device |
-
1981
- 1981-06-15 JP JP1981087800U patent/JPS6316972Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4979785A (https=) * | 1972-11-15 | 1974-08-01 | ||
| JPS52127770A (en) * | 1976-04-19 | 1977-10-26 | Fujitsu Ltd | Spatter etching method |
| JPS53116076A (en) * | 1977-03-22 | 1978-10-11 | Hitachi Ltd | Plasma processing method and its unit |
| JPS54131865A (en) * | 1978-04-03 | 1979-10-13 | Nec Corp | Wafer scribing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6316972Y2 (https=) | 1988-05-13 |