JPS57199815U - - Google Patents

Info

Publication number
JPS57199815U
JPS57199815U JP8780081U JP8780081U JPS57199815U JP S57199815 U JPS57199815 U JP S57199815U JP 8780081 U JP8780081 U JP 8780081U JP 8780081 U JP8780081 U JP 8780081U JP S57199815 U JPS57199815 U JP S57199815U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8780081U
Other languages
Japanese (ja)
Other versions
JPS6316972Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981087800U priority Critical patent/JPS6316972Y2/ja
Publication of JPS57199815U publication Critical patent/JPS57199815U/ja
Application granted granted Critical
Publication of JPS6316972Y2 publication Critical patent/JPS6316972Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Recording Measured Values (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
JP1981087800U 1981-06-15 1981-06-15 Expired JPS6316972Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981087800U JPS6316972Y2 (cg-RX-API-DMAC7.html) 1981-06-15 1981-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981087800U JPS6316972Y2 (cg-RX-API-DMAC7.html) 1981-06-15 1981-06-15

Publications (2)

Publication Number Publication Date
JPS57199815U true JPS57199815U (cg-RX-API-DMAC7.html) 1982-12-18
JPS6316972Y2 JPS6316972Y2 (cg-RX-API-DMAC7.html) 1988-05-13

Family

ID=29882996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981087800U Expired JPS6316972Y2 (cg-RX-API-DMAC7.html) 1981-06-15 1981-06-15

Country Status (1)

Country Link
JP (1) JPS6316972Y2 (cg-RX-API-DMAC7.html)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979785A (cg-RX-API-DMAC7.html) * 1972-11-15 1974-08-01
JPS52127770A (en) * 1976-04-19 1977-10-26 Fujitsu Ltd Spatter etching method
JPS53116076A (en) * 1977-03-22 1978-10-11 Hitachi Ltd Plasma processing method and its unit
JPS54131865A (en) * 1978-04-03 1979-10-13 Nec Corp Wafer scribing device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979785A (cg-RX-API-DMAC7.html) * 1972-11-15 1974-08-01
JPS52127770A (en) * 1976-04-19 1977-10-26 Fujitsu Ltd Spatter etching method
JPS53116076A (en) * 1977-03-22 1978-10-11 Hitachi Ltd Plasma processing method and its unit
JPS54131865A (en) * 1978-04-03 1979-10-13 Nec Corp Wafer scribing device

Also Published As

Publication number Publication date
JPS6316972Y2 (cg-RX-API-DMAC7.html) 1988-05-13

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