JPS5719854B2 - - Google Patents

Info

Publication number
JPS5719854B2
JPS5719854B2 JP9899478A JP9899478A JPS5719854B2 JP S5719854 B2 JPS5719854 B2 JP S5719854B2 JP 9899478 A JP9899478 A JP 9899478A JP 9899478 A JP9899478 A JP 9899478A JP S5719854 B2 JPS5719854 B2 JP S5719854B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9899478A
Other languages
Japanese (ja)
Other versions
JPS5526634A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9899478A priority Critical patent/JPS5526634A/en
Publication of JPS5526634A publication Critical patent/JPS5526634A/en
Publication of JPS5719854B2 publication Critical patent/JPS5719854B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
JP9899478A 1978-08-16 1978-08-16 Electron beam exposing device Granted JPS5526634A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9899478A JPS5526634A (en) 1978-08-16 1978-08-16 Electron beam exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9899478A JPS5526634A (en) 1978-08-16 1978-08-16 Electron beam exposing device

Publications (2)

Publication Number Publication Date
JPS5526634A JPS5526634A (en) 1980-02-26
JPS5719854B2 true JPS5719854B2 (en) 1982-04-24

Family

ID=14234526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9899478A Granted JPS5526634A (en) 1978-08-16 1978-08-16 Electron beam exposing device

Country Status (1)

Country Link
JP (1) JPS5526634A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0512909Y2 (en) * 1985-09-28 1993-04-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0512909Y2 (en) * 1985-09-28 1993-04-05

Also Published As

Publication number Publication date
JPS5526634A (en) 1980-02-26

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