JPS57196112A - Method and device for measuring and controlling volume and flow rate of gas in duct - Google Patents

Method and device for measuring and controlling volume and flow rate of gas in duct

Info

Publication number
JPS57196112A
JPS57196112A JP7942981A JP7942981A JPS57196112A JP S57196112 A JPS57196112 A JP S57196112A JP 7942981 A JP7942981 A JP 7942981A JP 7942981 A JP7942981 A JP 7942981A JP S57196112 A JPS57196112 A JP S57196112A
Authority
JP
Japan
Prior art keywords
duct
measuring
gas
flow rate
controlling volume
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7942981A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311406B2 (enExample
Inventor
Richiyaado Kenedei Rin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PRECISION MACH PROD
PURESHIJIYON MACHINE PURODAKUTSU Inc
Original Assignee
PRECISION MACH PROD
PURESHIJIYON MACHINE PURODAKUTSU Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PRECISION MACH PROD, PURESHIJIYON MACHINE PURODAKUTSU Inc filed Critical PRECISION MACH PROD
Priority to JP7942981A priority Critical patent/JPS57196112A/ja
Publication of JPS57196112A publication Critical patent/JPS57196112A/ja
Publication of JPH0311406B2 publication Critical patent/JPH0311406B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP7942981A 1981-05-27 1981-05-27 Method and device for measuring and controlling volume and flow rate of gas in duct Granted JPS57196112A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7942981A JPS57196112A (en) 1981-05-27 1981-05-27 Method and device for measuring and controlling volume and flow rate of gas in duct

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7942981A JPS57196112A (en) 1981-05-27 1981-05-27 Method and device for measuring and controlling volume and flow rate of gas in duct

Publications (2)

Publication Number Publication Date
JPS57196112A true JPS57196112A (en) 1982-12-02
JPH0311406B2 JPH0311406B2 (enExample) 1991-02-15

Family

ID=13689623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7942981A Granted JPS57196112A (en) 1981-05-27 1981-05-27 Method and device for measuring and controlling volume and flow rate of gas in duct

Country Status (1)

Country Link
JP (1) JPS57196112A (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367467A (en) * 1976-11-29 1978-06-15 Hitachi Ltd Air flow meter for fuel feeder
JPS546453U (enExample) * 1977-06-16 1979-01-17
JPS5595824A (en) * 1979-01-13 1980-07-21 Mitsubishi Heavy Ind Ltd Measuring device for discharged gas amount in ultra-high vacuum

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367467A (en) * 1976-11-29 1978-06-15 Hitachi Ltd Air flow meter for fuel feeder
JPS546453U (enExample) * 1977-06-16 1979-01-17
JPS5595824A (en) * 1979-01-13 1980-07-21 Mitsubishi Heavy Ind Ltd Measuring device for discharged gas amount in ultra-high vacuum

Also Published As

Publication number Publication date
JPH0311406B2 (enExample) 1991-02-15

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