JPS57194500A - High frequency heat controller for plasma - Google Patents

High frequency heat controller for plasma

Info

Publication number
JPS57194500A
JPS57194500A JP56078597A JP7859781A JPS57194500A JP S57194500 A JPS57194500 A JP S57194500A JP 56078597 A JP56078597 A JP 56078597A JP 7859781 A JP7859781 A JP 7859781A JP S57194500 A JPS57194500 A JP S57194500A
Authority
JP
Japan
Prior art keywords
plasma
high frequency
frequency heat
heat controller
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56078597A
Other languages
Japanese (ja)
Inventor
Hideo Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56078597A priority Critical patent/JPS57194500A/en
Publication of JPS57194500A publication Critical patent/JPS57194500A/en
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/10Nuclear fusion reactors
JP56078597A 1981-05-26 1981-05-26 High frequency heat controller for plasma Pending JPS57194500A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56078597A JPS57194500A (en) 1981-05-26 1981-05-26 High frequency heat controller for plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56078597A JPS57194500A (en) 1981-05-26 1981-05-26 High frequency heat controller for plasma

Publications (1)

Publication Number Publication Date
JPS57194500A true JPS57194500A (en) 1982-11-30

Family

ID=13666303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56078597A Pending JPS57194500A (en) 1981-05-26 1981-05-26 High frequency heat controller for plasma

Country Status (1)

Country Link
JP (1) JPS57194500A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6116314A (en) * 1984-07-02 1986-01-24 Matsushita Electric Ind Co Ltd High frequency power supply device
JPH0199116A (en) * 1987-10-12 1989-04-18 Fujitsu Ltd Method for controlling high frequency power source
JP2005269477A (en) * 2004-03-22 2005-09-29 Daihen Corp Output power control method of high frequency power source and high frequency power device
JP2012238616A (en) * 2006-02-21 2012-12-06 Goji Ltd Electromagnetic heating
US10687395B2 (en) 2008-11-10 2020-06-16 Goji Limited Device for controlling energy
US11729871B2 (en) 2006-02-21 2023-08-15 Joliet 2010 Limited System and method for applying electromagnetic energy

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329771A (en) * 1976-08-31 1978-03-20 Toshiba Corp High frequency power detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329771A (en) * 1976-08-31 1978-03-20 Toshiba Corp High frequency power detector

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6116314A (en) * 1984-07-02 1986-01-24 Matsushita Electric Ind Co Ltd High frequency power supply device
JPH0576045B2 (en) * 1984-07-02 1993-10-21 Matsushita Electric Ind Co Ltd
JPH0199116A (en) * 1987-10-12 1989-04-18 Fujitsu Ltd Method for controlling high frequency power source
JP2005269477A (en) * 2004-03-22 2005-09-29 Daihen Corp Output power control method of high frequency power source and high frequency power device
JP4490142B2 (en) * 2004-03-22 2010-06-23 株式会社ダイヘン High frequency power supply output power control method and high frequency power supply apparatus
JP2012238616A (en) * 2006-02-21 2012-12-06 Goji Ltd Electromagnetic heating
US9040883B2 (en) 2006-02-21 2015-05-26 Goji Limited Electromagnetic heating
US9078298B2 (en) 2006-02-21 2015-07-07 Goji Limited Electromagnetic heating
US11523474B2 (en) 2006-02-21 2022-12-06 Goji Limited Electromagnetic heating
US11729871B2 (en) 2006-02-21 2023-08-15 Joliet 2010 Limited System and method for applying electromagnetic energy
US10687395B2 (en) 2008-11-10 2020-06-16 Goji Limited Device for controlling energy
US11653425B2 (en) 2008-11-10 2023-05-16 Joliet 2010 Limited Device and method for controlling energy

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