JPS57194050U - - Google Patents
Info
- Publication number
- JPS57194050U JPS57194050U JP8220181U JP8220181U JPS57194050U JP S57194050 U JPS57194050 U JP S57194050U JP 8220181 U JP8220181 U JP 8220181U JP 8220181 U JP8220181 U JP 8220181U JP S57194050 U JPS57194050 U JP S57194050U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Measuring Cells (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8220181U JPS57194050U (OSRAM) | 1981-06-05 | 1981-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8220181U JPS57194050U (OSRAM) | 1981-06-05 | 1981-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57194050U true JPS57194050U (OSRAM) | 1982-12-09 |
Family
ID=29877682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8220181U Pending JPS57194050U (OSRAM) | 1981-06-05 | 1981-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57194050U (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6336532A (ja) * | 1986-07-30 | 1988-02-17 | Tokyo Electron Ltd | 光導入窓の曇防止装置 |
| JPH0669172A (ja) * | 1992-12-25 | 1994-03-11 | Tokyo Electron Ltd | 光窓の曇防止装置およびプラズマ処理装置 |
| JP2006313847A (ja) * | 2005-05-09 | 2006-11-16 | Hitachi High-Technologies Corp | プラズマ発光測定システム |
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1981
- 1981-06-05 JP JP8220181U patent/JPS57194050U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6336532A (ja) * | 1986-07-30 | 1988-02-17 | Tokyo Electron Ltd | 光導入窓の曇防止装置 |
| JPH0669172A (ja) * | 1992-12-25 | 1994-03-11 | Tokyo Electron Ltd | 光窓の曇防止装置およびプラズマ処理装置 |
| JP2006313847A (ja) * | 2005-05-09 | 2006-11-16 | Hitachi High-Technologies Corp | プラズマ発光測定システム |