JPS57188473A - Thin film multi-laminate structure and manufacture - Google Patents
Thin film multi-laminate structure and manufactureInfo
- Publication number
- JPS57188473A JPS57188473A JP7364481A JP7364481A JPS57188473A JP S57188473 A JPS57188473 A JP S57188473A JP 7364481 A JP7364481 A JP 7364481A JP 7364481 A JP7364481 A JP 7364481A JP S57188473 A JPS57188473 A JP S57188473A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- thin film
- laminate structure
- film multi
- laminate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7364481A JPS57188473A (en) | 1981-05-15 | 1981-05-15 | Thin film multi-laminate structure and manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7364481A JPS57188473A (en) | 1981-05-15 | 1981-05-15 | Thin film multi-laminate structure and manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57188473A true JPS57188473A (en) | 1982-11-19 |
JPS6235392B2 JPS6235392B2 (enrdf_load_stackoverflow) | 1987-08-01 |
Family
ID=13524198
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7364481A Granted JPS57188473A (en) | 1981-05-15 | 1981-05-15 | Thin film multi-laminate structure and manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57188473A (enrdf_load_stackoverflow) |
-
1981
- 1981-05-15 JP JP7364481A patent/JPS57188473A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6235392B2 (enrdf_load_stackoverflow) | 1987-08-01 |
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