JPS57187967U - - Google Patents
Info
- Publication number
- JPS57187967U JPS57187967U JP7574381U JP7574381U JPS57187967U JP S57187967 U JPS57187967 U JP S57187967U JP 7574381 U JP7574381 U JP 7574381U JP 7574381 U JP7574381 U JP 7574381U JP S57187967 U JPS57187967 U JP S57187967U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sliding Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7574381U JPS57187967U (ko) | 1981-05-27 | 1981-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7574381U JPS57187967U (ko) | 1981-05-27 | 1981-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57187967U true JPS57187967U (ko) | 1982-11-29 |
Family
ID=29871465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7574381U Pending JPS57187967U (ko) | 1981-05-27 | 1981-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57187967U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010230076A (ja) * | 2009-03-27 | 2010-10-14 | Tokyo Electron Ltd | ゲートバルブ装置 |
-
1981
- 1981-05-27 JP JP7574381U patent/JPS57187967U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010230076A (ja) * | 2009-03-27 | 2010-10-14 | Tokyo Electron Ltd | ゲートバルブ装置 |