JPS57183743U - - Google Patents
Info
- Publication number
- JPS57183743U JPS57183743U JP7174481U JP7174481U JPS57183743U JP S57183743 U JPS57183743 U JP S57183743U JP 7174481 U JP7174481 U JP 7174481U JP 7174481 U JP7174481 U JP 7174481U JP S57183743 U JPS57183743 U JP S57183743U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7174481U JPS57183743U (en) | 1981-05-18 | 1981-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7174481U JPS57183743U (en) | 1981-05-18 | 1981-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57183743U true JPS57183743U (en) | 1982-11-20 |
Family
ID=29867535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7174481U Pending JPS57183743U (en) | 1981-05-18 | 1981-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57183743U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117572A (en) * | 1976-03-30 | 1977-10-03 | Toshiba Corp | Electronic beam exposure unit |
| JPS5421687A (en) * | 1977-07-18 | 1979-02-19 | Mitsubishi Electric Corp | Device for detecting abnormality of operation of machines |
-
1981
- 1981-05-18 JP JP7174481U patent/JPS57183743U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117572A (en) * | 1976-03-30 | 1977-10-03 | Toshiba Corp | Electronic beam exposure unit |
| JPS5421687A (en) * | 1977-07-18 | 1979-02-19 | Mitsubishi Electric Corp | Device for detecting abnormality of operation of machines |