JPS57182134U - - Google Patents
Info
- Publication number
- JPS57182134U JPS57182134U JP6890681U JP6890681U JPS57182134U JP S57182134 U JPS57182134 U JP S57182134U JP 6890681 U JP6890681 U JP 6890681U JP 6890681 U JP6890681 U JP 6890681U JP S57182134 U JPS57182134 U JP S57182134U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6890681U JPS57182134U (enExample) | 1981-05-13 | 1981-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6890681U JPS57182134U (enExample) | 1981-05-13 | 1981-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57182134U true JPS57182134U (enExample) | 1982-11-18 |
Family
ID=29864800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6890681U Pending JPS57182134U (enExample) | 1981-05-13 | 1981-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57182134U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004117368A (ja) * | 2003-10-14 | 2004-04-15 | Tokyo Electron Ltd | 音響センサ |
| JP2022096264A (ja) * | 2020-12-17 | 2022-06-29 | 東邦化成株式会社 | 基板処理装置および音圧センサ |
| JP2023541652A (ja) * | 2020-09-14 | 2023-10-03 | ワームセンシング | 機械的波動センサを搭載した機能化オブジェクト及びその製造方法 |
-
1981
- 1981-05-13 JP JP6890681U patent/JPS57182134U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004117368A (ja) * | 2003-10-14 | 2004-04-15 | Tokyo Electron Ltd | 音響センサ |
| JP2023541652A (ja) * | 2020-09-14 | 2023-10-03 | ワームセンシング | 機械的波動センサを搭載した機能化オブジェクト及びその製造方法 |
| JP2022096264A (ja) * | 2020-12-17 | 2022-06-29 | 東邦化成株式会社 | 基板処理装置および音圧センサ |