JPS57180100A - Cooler for neutral particle incident unit - Google Patents

Cooler for neutral particle incident unit

Info

Publication number
JPS57180100A
JPS57180100A JP56064169A JP6416981A JPS57180100A JP S57180100 A JPS57180100 A JP S57180100A JP 56064169 A JP56064169 A JP 56064169A JP 6416981 A JP6416981 A JP 6416981A JP S57180100 A JPS57180100 A JP S57180100A
Authority
JP
Japan
Prior art keywords
cooler
neutral particle
incident unit
particle incident
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56064169A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262040B2 (enrdf_load_stackoverflow
Inventor
Masanori Araki
Shiyouji Isobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Japan Atomic Energy Agency
Original Assignee
Hitachi Ltd
Japan Atomic Energy Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Japan Atomic Energy Research Institute filed Critical Hitachi Ltd
Priority to JP56064169A priority Critical patent/JPS57180100A/ja
Publication of JPS57180100A publication Critical patent/JPS57180100A/ja
Publication of JPS6262040B2 publication Critical patent/JPS6262040B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP56064169A 1981-04-30 1981-04-30 Cooler for neutral particle incident unit Granted JPS57180100A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56064169A JPS57180100A (en) 1981-04-30 1981-04-30 Cooler for neutral particle incident unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56064169A JPS57180100A (en) 1981-04-30 1981-04-30 Cooler for neutral particle incident unit

Publications (2)

Publication Number Publication Date
JPS57180100A true JPS57180100A (en) 1982-11-05
JPS6262040B2 JPS6262040B2 (enrdf_load_stackoverflow) 1987-12-24

Family

ID=13250286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56064169A Granted JPS57180100A (en) 1981-04-30 1981-04-30 Cooler for neutral particle incident unit

Country Status (1)

Country Link
JP (1) JPS57180100A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0172407U (enrdf_load_stackoverflow) * 1987-11-04 1989-05-16

Also Published As

Publication number Publication date
JPS6262040B2 (enrdf_load_stackoverflow) 1987-12-24

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