JPS57178702U - - Google Patents
Info
- Publication number
- JPS57178702U JPS57178702U JP6697081U JP6697081U JPS57178702U JP S57178702 U JPS57178702 U JP S57178702U JP 6697081 U JP6697081 U JP 6697081U JP 6697081 U JP6697081 U JP 6697081U JP S57178702 U JPS57178702 U JP S57178702U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Constitution Of High-Frequency Heating (AREA)
- Waveguide Switches, Polarizers, And Phase Shifters (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981066970U JPS6213355Y2 (https=) | 1981-05-09 | 1981-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981066970U JPS6213355Y2 (https=) | 1981-05-09 | 1981-05-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57178702U true JPS57178702U (https=) | 1982-11-12 |
| JPS6213355Y2 JPS6213355Y2 (https=) | 1987-04-06 |
Family
ID=29862992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981066970U Expired JPS6213355Y2 (https=) | 1981-05-09 | 1981-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6213355Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015079677A (ja) * | 2013-10-17 | 2015-04-23 | 東京エレクトロン株式会社 | マイクロ波プラズマ処理装置及びマイクロ波供給方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5249752A (en) * | 1975-10-17 | 1977-04-21 | Matsushita Electric Ind Co Ltd | Electric wave switching guidewave |
-
1981
- 1981-05-09 JP JP1981066970U patent/JPS6213355Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5249752A (en) * | 1975-10-17 | 1977-04-21 | Matsushita Electric Ind Co Ltd | Electric wave switching guidewave |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015079677A (ja) * | 2013-10-17 | 2015-04-23 | 東京エレクトロン株式会社 | マイクロ波プラズマ処理装置及びマイクロ波供給方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6213355Y2 (https=) | 1987-04-06 |