JPS57178702U - - Google Patents

Info

Publication number
JPS57178702U
JPS57178702U JP6697081U JP6697081U JPS57178702U JP S57178702 U JPS57178702 U JP S57178702U JP 6697081 U JP6697081 U JP 6697081U JP 6697081 U JP6697081 U JP 6697081U JP S57178702 U JPS57178702 U JP S57178702U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6697081U
Other languages
Japanese (ja)
Other versions
JPS6213355Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981066970U priority Critical patent/JPS6213355Y2/ja
Publication of JPS57178702U publication Critical patent/JPS57178702U/ja
Application granted granted Critical
Publication of JPS6213355Y2 publication Critical patent/JPS6213355Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
  • Constitution Of High-Frequency Heating (AREA)
JP1981066970U 1981-05-09 1981-05-09 Expired JPS6213355Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981066970U JPS6213355Y2 (cg-RX-API-DMAC7.html) 1981-05-09 1981-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981066970U JPS6213355Y2 (cg-RX-API-DMAC7.html) 1981-05-09 1981-05-09

Publications (2)

Publication Number Publication Date
JPS57178702U true JPS57178702U (cg-RX-API-DMAC7.html) 1982-11-12
JPS6213355Y2 JPS6213355Y2 (cg-RX-API-DMAC7.html) 1987-04-06

Family

ID=29862992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981066970U Expired JPS6213355Y2 (cg-RX-API-DMAC7.html) 1981-05-09 1981-05-09

Country Status (1)

Country Link
JP (1) JPS6213355Y2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015079677A (ja) * 2013-10-17 2015-04-23 東京エレクトロン株式会社 マイクロ波プラズマ処理装置及びマイクロ波供給方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249752A (en) * 1975-10-17 1977-04-21 Matsushita Electric Ind Co Ltd Electric wave switching guidewave

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249752A (en) * 1975-10-17 1977-04-21 Matsushita Electric Ind Co Ltd Electric wave switching guidewave

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015079677A (ja) * 2013-10-17 2015-04-23 東京エレクトロン株式会社 マイクロ波プラズマ処理装置及びマイクロ波供給方法

Also Published As

Publication number Publication date
JPS6213355Y2 (cg-RX-API-DMAC7.html) 1987-04-06

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