JPS57177641U - - Google Patents
Info
- Publication number
- JPS57177641U JPS57177641U JP1981063270U JP6327081U JPS57177641U JP S57177641 U JPS57177641 U JP S57177641U JP 1981063270 U JP1981063270 U JP 1981063270U JP 6327081 U JP6327081 U JP 6327081U JP S57177641 U JPS57177641 U JP S57177641U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981063270U JPS57177641U (it) | 1981-04-30 | 1981-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981063270U JPS57177641U (it) | 1981-04-30 | 1981-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57177641U true JPS57177641U (it) | 1982-11-10 |
Family
ID=29859395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981063270U Pending JPS57177641U (it) | 1981-04-30 | 1981-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57177641U (it) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0776030A2 (en) | 1995-11-27 | 1997-05-28 | Shin-Etsu Handotai Company Limited | Apparatus and method for double-side polishing semiconductor wafers |
| KR20020005980A (ko) * | 2000-07-10 | 2002-01-18 | 엔다 나오또 | 피연마물 지지재 및 그 제조방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5555957U (it) * | 1978-10-09 | 1980-04-16 |
-
1981
- 1981-04-30 JP JP1981063270U patent/JPS57177641U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5555957U (it) * | 1978-10-09 | 1980-04-16 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0776030A2 (en) | 1995-11-27 | 1997-05-28 | Shin-Etsu Handotai Company Limited | Apparatus and method for double-side polishing semiconductor wafers |
| KR20020005980A (ko) * | 2000-07-10 | 2002-01-18 | 엔다 나오또 | 피연마물 지지재 및 그 제조방법 |