JPS57177422A - Damage preventer for air bearing - Google Patents

Damage preventer for air bearing

Info

Publication number
JPS57177422A
JPS57177422A JP6123881A JP6123881A JPS57177422A JP S57177422 A JPS57177422 A JP S57177422A JP 6123881 A JP6123881 A JP 6123881A JP 6123881 A JP6123881 A JP 6123881A JP S57177422 A JPS57177422 A JP S57177422A
Authority
JP
Japan
Prior art keywords
gap
bearing
air
dust
air bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6123881A
Other languages
Japanese (ja)
Inventor
Takuji Tajima
Yoshitake Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Hitachi Seiko Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Seiko Ltd filed Critical Hitachi Seiko Ltd
Priority to JP6123881A priority Critical patent/JPS57177422A/en
Publication of JPS57177422A publication Critical patent/JPS57177422A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding-Contact Bearings (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:In a damage preventer for an air bearing where an air film is formed between the bearing and the object to be supported to support the object while floating, to protect the bearing from damage due to the adhesion of the dust by detecting that the electrical resistance of the dust in said gap is below the predetermined level. CONSTITUTION:The rotary shaft 2 is supported by an air bearing 1 secured in the housing 6 and floated by the air film formed between the gap 3 by the air 4 to be fed through the orifice 5. A ring 7 is secured to the rotary shaft 2 and contacting with one end of the brush 8. A D.C. power source 9 and an ammeter 10 are connected in series between the other end of the brush 8 and the housing 6 to constitute the electrical circuit where said gap 3 is the resistor. When the dust is accumulated in the gap 3 the current is detected by the ammeter 10 in accordance to the voltage from the power source 9. Consequently only when the resistance drop voltage due to said current is provided to one input end of a differential amplifier 11 and exceeds over the referential voltage 12 applied on the other input end, such as an alarm 13 is functioned.
JP6123881A 1981-04-24 1981-04-24 Damage preventer for air bearing Pending JPS57177422A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6123881A JPS57177422A (en) 1981-04-24 1981-04-24 Damage preventer for air bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6123881A JPS57177422A (en) 1981-04-24 1981-04-24 Damage preventer for air bearing

Publications (1)

Publication Number Publication Date
JPS57177422A true JPS57177422A (en) 1982-11-01

Family

ID=13165444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6123881A Pending JPS57177422A (en) 1981-04-24 1981-04-24 Damage preventer for air bearing

Country Status (1)

Country Link
JP (1) JPS57177422A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63246502A (en) * 1987-03-31 1988-10-13 Aida Eng Ltd Bearing seizing preventing device
JP2007247812A (en) * 2006-03-16 2007-09-27 Sumitomo Heavy Ind Ltd Hydrostatic air bearing monitoring device and stage device equipped therewith
CN104040176A (en) * 2011-11-16 2014-09-10 惠而浦股份公司 Restrictor and production process of a fluid leakage restrictor for aerostatic bearings

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63246502A (en) * 1987-03-31 1988-10-13 Aida Eng Ltd Bearing seizing preventing device
JP2007247812A (en) * 2006-03-16 2007-09-27 Sumitomo Heavy Ind Ltd Hydrostatic air bearing monitoring device and stage device equipped therewith
CN104040176A (en) * 2011-11-16 2014-09-10 惠而浦股份公司 Restrictor and production process of a fluid leakage restrictor for aerostatic bearings

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