JPS5717243B2 - - Google Patents
Info
- Publication number
- JPS5717243B2 JPS5717243B2 JP13265576A JP13265576A JPS5717243B2 JP S5717243 B2 JPS5717243 B2 JP S5717243B2 JP 13265576 A JP13265576 A JP 13265576A JP 13265576 A JP13265576 A JP 13265576A JP S5717243 B2 JPS5717243 B2 JP S5717243B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13265576A JPS5357856A (en) | 1976-11-04 | 1976-11-04 | Measuring apparatus for photoelectric conversion system pattern size |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13265576A JPS5357856A (en) | 1976-11-04 | 1976-11-04 | Measuring apparatus for photoelectric conversion system pattern size |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5357856A JPS5357856A (en) | 1978-05-25 |
| JPS5717243B2 true JPS5717243B2 (pt) | 1982-04-09 |
Family
ID=15086391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13265576A Granted JPS5357856A (en) | 1976-11-04 | 1976-11-04 | Measuring apparatus for photoelectric conversion system pattern size |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5357856A (pt) |
-
1976
- 1976-11-04 JP JP13265576A patent/JPS5357856A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5357856A (en) | 1978-05-25 |