JPS57172060U - - Google Patents
Info
- Publication number
- JPS57172060U JPS57172060U JP5682581U JP5682581U JPS57172060U JP S57172060 U JPS57172060 U JP S57172060U JP 5682581 U JP5682581 U JP 5682581U JP 5682581 U JP5682581 U JP 5682581U JP S57172060 U JPS57172060 U JP S57172060U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5682581U JPS57172060U (de) | 1981-04-20 | 1981-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5682581U JPS57172060U (de) | 1981-04-20 | 1981-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57172060U true JPS57172060U (de) | 1982-10-29 |
Family
ID=29853315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5682581U Pending JPS57172060U (de) | 1981-04-20 | 1981-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57172060U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013249543A (ja) * | 1999-12-27 | 2013-12-12 | Semiconductor Energy Lab Co Ltd | 成膜装置 |
-
1981
- 1981-04-20 JP JP5682581U patent/JPS57172060U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013249543A (ja) * | 1999-12-27 | 2013-12-12 | Semiconductor Energy Lab Co Ltd | 成膜装置 |