JPS57168278U - - Google Patents
Info
- Publication number
- JPS57168278U JPS57168278U JP5603281U JP5603281U JPS57168278U JP S57168278 U JPS57168278 U JP S57168278U JP 5603281 U JP5603281 U JP 5603281U JP 5603281 U JP5603281 U JP 5603281U JP S57168278 U JPS57168278 U JP S57168278U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Casings For Electric Apparatus (AREA)
- Mounting Of Printed Circuit Boards And The Like (AREA)
- Stackable Containers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5603281U JPS6320151Y2 (en:Method) | 1981-04-17 | 1981-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5603281U JPS6320151Y2 (en:Method) | 1981-04-17 | 1981-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57168278U true JPS57168278U (en:Method) | 1982-10-23 |
| JPS6320151Y2 JPS6320151Y2 (en:Method) | 1988-06-03 |
Family
ID=29852550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5603281U Expired JPS6320151Y2 (en:Method) | 1981-04-17 | 1981-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6320151Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7578647B2 (en) | 2003-01-27 | 2009-08-25 | Applied Materials, Inc. | Load port configurations for small lot size substrate carriers |
-
1981
- 1981-04-17 JP JP5603281U patent/JPS6320151Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6320151Y2 (en:Method) | 1988-06-03 |