JPS57167763U - - Google Patents
Info
- Publication number
- JPS57167763U JPS57167763U JP5197981U JP5197981U JPS57167763U JP S57167763 U JPS57167763 U JP S57167763U JP 5197981 U JP5197981 U JP 5197981U JP 5197981 U JP5197981 U JP 5197981U JP S57167763 U JPS57167763 U JP S57167763U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981051979U JPS6113553Y2 (en:Method) | 1981-04-13 | 1981-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981051979U JPS6113553Y2 (en:Method) | 1981-04-13 | 1981-04-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57167763U true JPS57167763U (en:Method) | 1982-10-22 |
| JPS6113553Y2 JPS6113553Y2 (en:Method) | 1986-04-26 |
Family
ID=29848688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981051979U Expired JPS6113553Y2 (en:Method) | 1981-04-13 | 1981-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6113553Y2 (en:Method) |
-
1981
- 1981-04-13 JP JP1981051979U patent/JPS6113553Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6113553Y2 (en:Method) | 1986-04-26 |