JPS57167763U - - Google Patents

Info

Publication number
JPS57167763U
JPS57167763U JP5197981U JP5197981U JPS57167763U JP S57167763 U JPS57167763 U JP S57167763U JP 5197981 U JP5197981 U JP 5197981U JP 5197981 U JP5197981 U JP 5197981U JP S57167763 U JPS57167763 U JP S57167763U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5197981U
Other languages
Japanese (ja)
Other versions
JPS6113553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981051979U priority Critical patent/JPS6113553Y2/ja
Publication of JPS57167763U publication Critical patent/JPS57167763U/ja
Application granted granted Critical
Publication of JPS6113553Y2 publication Critical patent/JPS6113553Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1981051979U 1981-04-13 1981-04-13 Expired JPS6113553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981051979U JPS6113553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-04-13 1981-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981051979U JPS6113553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-04-13 1981-04-13

Publications (2)

Publication Number Publication Date
JPS57167763U true JPS57167763U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-10-22
JPS6113553Y2 JPS6113553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-04-26

Family

ID=29848688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981051979U Expired JPS6113553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-04-13 1981-04-13

Country Status (1)

Country Link
JP (1) JPS6113553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6113553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-04-26

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