JPS57166398U - - Google Patents
Info
- Publication number
- JPS57166398U JPS57166398U JP5394881U JP5394881U JPS57166398U JP S57166398 U JPS57166398 U JP S57166398U JP 5394881 U JP5394881 U JP 5394881U JP 5394881 U JP5394881 U JP 5394881U JP S57166398 U JPS57166398 U JP S57166398U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Accelerators (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981053948U JPS633200Y2 (https=) | 1981-04-14 | 1981-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981053948U JPS633200Y2 (https=) | 1981-04-14 | 1981-04-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57166398U true JPS57166398U (https=) | 1982-10-20 |
| JPS633200Y2 JPS633200Y2 (https=) | 1988-01-26 |
Family
ID=29850561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981053948U Expired JPS633200Y2 (https=) | 1981-04-14 | 1981-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633200Y2 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4976481A (https=) * | 1972-11-27 | 1974-07-23 | ||
| JPS5434676A (en) * | 1977-08-23 | 1979-03-14 | Fujitsu Ltd | Vapor growth method and apparatus for high-purity semiconductor layer |
-
1981
- 1981-04-14 JP JP1981053948U patent/JPS633200Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4976481A (https=) * | 1972-11-27 | 1974-07-23 | ||
| JPS5434676A (en) * | 1977-08-23 | 1979-03-14 | Fujitsu Ltd | Vapor growth method and apparatus for high-purity semiconductor layer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS633200Y2 (https=) | 1988-01-26 |