JPS57166398U - - Google Patents

Info

Publication number
JPS57166398U
JPS57166398U JP5394881U JP5394881U JPS57166398U JP S57166398 U JPS57166398 U JP S57166398U JP 5394881 U JP5394881 U JP 5394881U JP 5394881 U JP5394881 U JP 5394881U JP S57166398 U JPS57166398 U JP S57166398U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5394881U
Other languages
Japanese (ja)
Other versions
JPS633200Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981053948U priority Critical patent/JPS633200Y2/ja
Publication of JPS57166398U publication Critical patent/JPS57166398U/ja
Application granted granted Critical
Publication of JPS633200Y2 publication Critical patent/JPS633200Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
JP1981053948U 1981-04-14 1981-04-14 Expired JPS633200Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981053948U JPS633200Y2 (en:Method) 1981-04-14 1981-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981053948U JPS633200Y2 (en:Method) 1981-04-14 1981-04-14

Publications (2)

Publication Number Publication Date
JPS57166398U true JPS57166398U (en:Method) 1982-10-20
JPS633200Y2 JPS633200Y2 (en:Method) 1988-01-26

Family

ID=29850561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981053948U Expired JPS633200Y2 (en:Method) 1981-04-14 1981-04-14

Country Status (1)

Country Link
JP (1) JPS633200Y2 (en:Method)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4976481A (en:Method) * 1972-11-27 1974-07-23
JPS5434676A (en) * 1977-08-23 1979-03-14 Fujitsu Ltd Vapor growth method and apparatus for high-purity semiconductor layer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4976481A (en:Method) * 1972-11-27 1974-07-23
JPS5434676A (en) * 1977-08-23 1979-03-14 Fujitsu Ltd Vapor growth method and apparatus for high-purity semiconductor layer

Also Published As

Publication number Publication date
JPS633200Y2 (en:Method) 1988-01-26

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