JPS57162371U - - Google Patents

Info

Publication number
JPS57162371U
JPS57162371U JP4534481U JP4534481U JPS57162371U JP S57162371 U JPS57162371 U JP S57162371U JP 4534481 U JP4534481 U JP 4534481U JP 4534481 U JP4534481 U JP 4534481U JP S57162371 U JPS57162371 U JP S57162371U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4534481U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4534481U priority Critical patent/JPS57162371U/ja
Publication of JPS57162371U publication Critical patent/JPS57162371U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4534481U 1981-04-01 1981-04-01 Pending JPS57162371U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4534481U JPS57162371U (enrdf_load_stackoverflow) 1981-04-01 1981-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4534481U JPS57162371U (enrdf_load_stackoverflow) 1981-04-01 1981-04-01

Publications (1)

Publication Number Publication Date
JPS57162371U true JPS57162371U (enrdf_load_stackoverflow) 1982-10-13

Family

ID=29842238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4534481U Pending JPS57162371U (enrdf_load_stackoverflow) 1981-04-01 1981-04-01

Country Status (1)

Country Link
JP (1) JPS57162371U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63213656A (ja) * 1987-02-28 1988-09-06 Meidensha Electric Mfg Co Ltd 炭素薄膜の形成装置
JP2005530042A (ja) * 2002-06-18 2005-10-06 リベル 差動真空ポンピングを行う材料蒸発室

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63213656A (ja) * 1987-02-28 1988-09-06 Meidensha Electric Mfg Co Ltd 炭素薄膜の形成装置
JP2005530042A (ja) * 2002-06-18 2005-10-06 リベル 差動真空ポンピングを行う材料蒸発室

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