JPS57162371U - - Google Patents
Info
- Publication number
- JPS57162371U JPS57162371U JP4534481U JP4534481U JPS57162371U JP S57162371 U JPS57162371 U JP S57162371U JP 4534481 U JP4534481 U JP 4534481U JP 4534481 U JP4534481 U JP 4534481U JP S57162371 U JPS57162371 U JP S57162371U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4534481U JPS57162371U (en) | 1981-04-01 | 1981-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4534481U JPS57162371U (en) | 1981-04-01 | 1981-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57162371U true JPS57162371U (en) | 1982-10-13 |
Family
ID=29842238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4534481U Pending JPS57162371U (en) | 1981-04-01 | 1981-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57162371U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63213656A (en) * | 1987-02-28 | 1988-09-06 | Meidensha Electric Mfg Co Ltd | Device for forming thin carbon film |
| JP2005530042A (en) * | 2002-06-18 | 2005-10-06 | リベル | Material evaporation chamber with differential vacuum pumping |
-
1981
- 1981-04-01 JP JP4534481U patent/JPS57162371U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63213656A (en) * | 1987-02-28 | 1988-09-06 | Meidensha Electric Mfg Co Ltd | Device for forming thin carbon film |
| JP2005530042A (en) * | 2002-06-18 | 2005-10-06 | リベル | Material evaporation chamber with differential vacuum pumping |