JPS57161237U - - Google Patents
Info
- Publication number
- JPS57161237U JPS57161237U JP4730381U JP4730381U JPS57161237U JP S57161237 U JPS57161237 U JP S57161237U JP 4730381 U JP4730381 U JP 4730381U JP 4730381 U JP4730381 U JP 4730381U JP S57161237 U JPS57161237 U JP S57161237U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4730381U JPS57161237U (ja) | 1981-04-03 | 1981-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4730381U JPS57161237U (ja) | 1981-04-03 | 1981-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57161237U true JPS57161237U (ja) | 1982-10-09 |
Family
ID=29844112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4730381U Pending JPS57161237U (ja) | 1981-04-03 | 1981-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57161237U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62254422A (ja) * | 1986-04-28 | 1987-11-06 | Fukui Shinetsu Sekiei:Kk | ウエハ支持ボ−ト |
-
1981
- 1981-04-03 JP JP4730381U patent/JPS57161237U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62254422A (ja) * | 1986-04-28 | 1987-11-06 | Fukui Shinetsu Sekiei:Kk | ウエハ支持ボ−ト |