JPS57151179U - - Google Patents

Info

Publication number
JPS57151179U
JPS57151179U JP3763981U JP3763981U JPS57151179U JP S57151179 U JPS57151179 U JP S57151179U JP 3763981 U JP3763981 U JP 3763981U JP 3763981 U JP3763981 U JP 3763981U JP S57151179 U JPS57151179 U JP S57151179U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3763981U
Other languages
Japanese (ja)
Other versions
JPS6138863Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3763981U priority Critical patent/JPS6138863Y2/ja
Publication of JPS57151179U publication Critical patent/JPS57151179U/ja
Application granted granted Critical
Publication of JPS6138863Y2 publication Critical patent/JPS6138863Y2/ja
Expired legal-status Critical Current

Links

JP3763981U 1981-03-19 1981-03-19 Expired JPS6138863Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3763981U JPS6138863Y2 (enrdf_load_html_response) 1981-03-19 1981-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3763981U JPS6138863Y2 (enrdf_load_html_response) 1981-03-19 1981-03-19

Publications (2)

Publication Number Publication Date
JPS57151179U true JPS57151179U (enrdf_load_html_response) 1982-09-22
JPS6138863Y2 JPS6138863Y2 (enrdf_load_html_response) 1986-11-08

Family

ID=29834827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3763981U Expired JPS6138863Y2 (enrdf_load_html_response) 1981-03-19 1981-03-19

Country Status (1)

Country Link
JP (1) JPS6138863Y2 (enrdf_load_html_response)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11447861B2 (en) 2016-12-15 2022-09-20 Asm Ip Holding B.V. Sequential infiltration synthesis apparatus and a method of forming a patterned structure
US10770286B2 (en) 2017-05-08 2020-09-08 Asm Ip Holdings B.V. Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
US10923344B2 (en) 2017-10-30 2021-02-16 Asm Ip Holding B.V. Methods for forming a semiconductor structure and related semiconductor structures
US11031242B2 (en) 2018-11-07 2021-06-08 Asm Ip Holding B.V. Methods for depositing a boron doped silicon germanium film
US12040199B2 (en) 2018-11-28 2024-07-16 Asm Ip Holding B.V. Substrate processing apparatus for processing substrates
USD975665S1 (en) 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
TWI851767B (zh) 2019-07-29 2024-08-11 荷蘭商Asm Ip私人控股有限公司 用於利用n型摻雜物及/或替代摻雜物選擇性沉積以達成高摻雜物併入之方法
USD979506S1 (en) 2019-08-22 2023-02-28 Asm Ip Holding B.V. Insulator
KR20210024423A (ko) 2019-08-22 2021-03-05 에이에스엠 아이피 홀딩 비.브이. 홀을 구비한 구조체를 형성하기 위한 방법
US12469693B2 (en) 2019-09-17 2025-11-11 Asm Ip Holding B.V. Method of forming a carbon-containing layer and structure including the layer
TWI869475B (zh) 2019-11-05 2025-01-11 荷蘭商Asm Ip私人控股有限公司 具有經摻雜半導體層之結構及用於形成上述結構之方法及系統
US12040177B2 (en) 2020-08-18 2024-07-16 Asm Ip Holding B.V. Methods for forming a laminate film by cyclical plasma-enhanced deposition processes

Also Published As

Publication number Publication date
JPS6138863Y2 (enrdf_load_html_response) 1986-11-08

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