JPS57148480U - - Google Patents
Info
- Publication number
- JPS57148480U JPS57148480U JP3463681U JP3463681U JPS57148480U JP S57148480 U JPS57148480 U JP S57148480U JP 3463681 U JP3463681 U JP 3463681U JP 3463681 U JP3463681 U JP 3463681U JP S57148480 U JPS57148480 U JP S57148480U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3463681U JPS57148480U (OSRAM) | 1981-03-12 | 1981-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3463681U JPS57148480U (OSRAM) | 1981-03-12 | 1981-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57148480U true JPS57148480U (OSRAM) | 1982-09-17 |
Family
ID=29831955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3463681U Pending JPS57148480U (OSRAM) | 1981-03-12 | 1981-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57148480U (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61133633A (ja) * | 1984-12-03 | 1986-06-20 | Mitsubishi Electric Corp | 半導体ウエ−ハの洗浄装置 |
| JPH0669175A (ja) * | 1993-01-27 | 1994-03-11 | Tokuyama Soda Co Ltd | 半導体基材の洗浄方法 |
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1981
- 1981-03-12 JP JP3463681U patent/JPS57148480U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61133633A (ja) * | 1984-12-03 | 1986-06-20 | Mitsubishi Electric Corp | 半導体ウエ−ハの洗浄装置 |
| JPH0669175A (ja) * | 1993-01-27 | 1994-03-11 | Tokuyama Soda Co Ltd | 半導体基材の洗浄方法 |