JPS57145972A - Formation of group iii-v compount - Google Patents

Formation of group iii-v compount

Info

Publication number
JPS57145972A
JPS57145972A JP18515181A JP18515181A JPS57145972A JP S57145972 A JPS57145972 A JP S57145972A JP 18515181 A JP18515181 A JP 18515181A JP 18515181 A JP18515181 A JP 18515181A JP S57145972 A JPS57145972 A JP S57145972A
Authority
JP
Japan
Prior art keywords
compount
formation
group iii
iii
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18515181A
Other languages
Japanese (ja)
Other versions
JPH0323633B2 (en
Inventor
Horanzu Mosu Rodonii
Marian Fuakutaa Maaku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BURITEITSUSHIYU TEREKOMIYUNIKEESHIYONZU RESEARCH Ltd
British Telecommunications PLC
Original Assignee
BURITEITSUSHIYU TEREKOMIYUNIKEESHIYONZU RESEARCH Ltd
British Telecommunications PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BURITEITSUSHIYU TEREKOMIYUNIKEESHIYONZU RESEARCH Ltd, British Telecommunications PLC filed Critical BURITEITSUSHIYU TEREKOMIYUNIKEESHIYONZU RESEARCH Ltd
Publication of JPS57145972A publication Critical patent/JPS57145972A/en
Publication of JPH0323633B2 publication Critical patent/JPH0323633B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP18515181A 1980-11-18 1981-11-18 Formation of group iii-v compount Granted JPS57145972A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8036902 1980-11-18

Publications (2)

Publication Number Publication Date
JPS57145972A true JPS57145972A (en) 1982-09-09
JPH0323633B2 JPH0323633B2 (en) 1991-03-29

Family

ID=10517376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18515181A Granted JPS57145972A (en) 1980-11-18 1981-11-18 Formation of group iii-v compount

Country Status (1)

Country Link
JP (1) JPS57145972A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104079A (en) * 1984-10-25 1986-05-22 モートン　チオコール　インコーポレーテツド Hybrid organometallic compound and metal organochemical vapor deposition method using the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4944788A (en) * 1972-09-01 1974-04-27
JPS5136588A (en) * 1974-09-25 1976-03-27 Sumitomo Electric Industries TASHINDOJIKU KEEBURU

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4944788A (en) * 1972-09-01 1974-04-27
JPS5136588A (en) * 1974-09-25 1976-03-27 Sumitomo Electric Industries TASHINDOJIKU KEEBURU

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104079A (en) * 1984-10-25 1986-05-22 モートン　チオコール　インコーポレーテツド Hybrid organometallic compound and metal organochemical vapor deposition method using the same
JPH0357188B2 (en) * 1984-10-25 1991-08-30

Also Published As

Publication number Publication date
JPH0323633B2 (en) 1991-03-29

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