JPS5714022B2 - - Google Patents
Info
- Publication number
- JPS5714022B2 JPS5714022B2 JP7257375A JP7257375A JPS5714022B2 JP S5714022 B2 JPS5714022 B2 JP S5714022B2 JP 7257375 A JP7257375 A JP 7257375A JP 7257375 A JP7257375 A JP 7257375A JP S5714022 B2 JPS5714022 B2 JP S5714022B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7257375A JPS51148364A (en) | 1975-06-14 | 1975-06-14 | Mask defect detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7257375A JPS51148364A (en) | 1975-06-14 | 1975-06-14 | Mask defect detection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51148364A JPS51148364A (en) | 1976-12-20 |
| JPS5714022B2 true JPS5714022B2 (en) | 1982-03-20 |
Family
ID=13493242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7257375A Granted JPS51148364A (en) | 1975-06-14 | 1975-06-14 | Mask defect detection method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51148364A (en) |
-
1975
- 1975-06-14 JP JP7257375A patent/JPS51148364A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51148364A (en) | 1976-12-20 |