JPS57136467U - - Google Patents

Info

Publication number
JPS57136467U
JPS57136467U JP2097881U JP2097881U JPS57136467U JP S57136467 U JPS57136467 U JP S57136467U JP 2097881 U JP2097881 U JP 2097881U JP 2097881 U JP2097881 U JP 2097881U JP S57136467 U JPS57136467 U JP S57136467U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2097881U
Other languages
Japanese (ja)
Other versions
JPS613493Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2097881U priority Critical patent/JPS613493Y2/ja
Publication of JPS57136467U publication Critical patent/JPS57136467U/ja
Application granted granted Critical
Publication of JPS613493Y2 publication Critical patent/JPS613493Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP2097881U 1981-02-16 1981-02-16 Expired JPS613493Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2097881U JPS613493Y2 (enExample) 1981-02-16 1981-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2097881U JPS613493Y2 (enExample) 1981-02-16 1981-02-16

Publications (2)

Publication Number Publication Date
JPS57136467U true JPS57136467U (enExample) 1982-08-25
JPS613493Y2 JPS613493Y2 (enExample) 1986-02-03

Family

ID=29818874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2097881U Expired JPS613493Y2 (enExample) 1981-02-16 1981-02-16

Country Status (1)

Country Link
JP (1) JPS613493Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0283927A (ja) * 1988-09-21 1990-03-26 Shibaura Eng Works Co Ltd ガラス基板の乾燥装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0283927A (ja) * 1988-09-21 1990-03-26 Shibaura Eng Works Co Ltd ガラス基板の乾燥装置

Also Published As

Publication number Publication date
JPS613493Y2 (enExample) 1986-02-03

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