JPS57132442U - - Google Patents
Info
- Publication number
- JPS57132442U JPS57132442U JP1861981U JP1861981U JPS57132442U JP S57132442 U JPS57132442 U JP S57132442U JP 1861981 U JP1861981 U JP 1861981U JP 1861981 U JP1861981 U JP 1861981U JP S57132442 U JPS57132442 U JP S57132442U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1861981U JPH0214198Y2 (https=) | 1981-02-12 | 1981-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1861981U JPH0214198Y2 (https=) | 1981-02-12 | 1981-02-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57132442U true JPS57132442U (https=) | 1982-08-18 |
| JPH0214198Y2 JPH0214198Y2 (https=) | 1990-04-18 |
Family
ID=29816579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1861981U Expired JPH0214198Y2 (https=) | 1981-02-12 | 1981-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214198Y2 (https=) |
-
1981
- 1981-02-12 JP JP1861981U patent/JPH0214198Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0214198Y2 (https=) | 1990-04-18 |