JPS57131881A - Volume type pump - Google Patents

Volume type pump

Info

Publication number
JPS57131881A
JPS57131881A JP56110619A JP11061981A JPS57131881A JP S57131881 A JPS57131881 A JP S57131881A JP 56110619 A JP56110619 A JP 56110619A JP 11061981 A JP11061981 A JP 11061981A JP S57131881 A JPS57131881 A JP S57131881A
Authority
JP
Japan
Prior art keywords
type pump
volume type
volume
pump
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56110619A
Other languages
Japanese (ja)
Inventor
Rindorosu Matsutsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB8023045A external-priority patent/GB2056169B/en
Application filed by Individual filed Critical Individual
Publication of JPS57131881A publication Critical patent/JPS57131881A/en
Pending legal-status Critical Current

Links

Landscapes

  • External Artificial Organs (AREA)
  • Reciprocating Pumps (AREA)
JP56110619A 1980-07-15 1981-07-15 Volume type pump Pending JPS57131881A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8023045A GB2056169B (en) 1979-07-27 1980-07-15 Manufacturing system for semiconductor devices

Publications (1)

Publication Number Publication Date
JPS57131881A true JPS57131881A (en) 1982-08-14

Family

ID=10514767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56110619A Pending JPS57131881A (en) 1980-07-15 1981-07-15 Volume type pump

Country Status (1)

Country Link
JP (1) JPS57131881A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3148624A (en) * 1961-06-21 1964-09-15 Alan W Baldwin Hydraulic pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3148624A (en) * 1961-06-21 1964-09-15 Alan W Baldwin Hydraulic pump

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