JPS57131881A - Volume type pump - Google Patents
Volume type pumpInfo
- Publication number
- JPS57131881A JPS57131881A JP56110619A JP11061981A JPS57131881A JP S57131881 A JPS57131881 A JP S57131881A JP 56110619 A JP56110619 A JP 56110619A JP 11061981 A JP11061981 A JP 11061981A JP S57131881 A JPS57131881 A JP S57131881A
- Authority
- JP
- Japan
- Prior art keywords
- type pump
- volume type
- volume
- pump
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- External Artificial Organs (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8023045A GB2056169B (en) | 1979-07-27 | 1980-07-15 | Manufacturing system for semiconductor devices |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57131881A true JPS57131881A (en) | 1982-08-14 |
Family
ID=10514767
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56110619A Pending JPS57131881A (en) | 1980-07-15 | 1981-07-15 | Volume type pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57131881A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3148624A (en) * | 1961-06-21 | 1964-09-15 | Alan W Baldwin | Hydraulic pump |
-
1981
- 1981-07-15 JP JP56110619A patent/JPS57131881A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3148624A (en) * | 1961-06-21 | 1964-09-15 | Alan W Baldwin | Hydraulic pump |
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