JPS57131244U - - Google Patents
Info
- Publication number
- JPS57131244U JPS57131244U JP1706081U JP1706081U JPS57131244U JP S57131244 U JPS57131244 U JP S57131244U JP 1706081 U JP1706081 U JP 1706081U JP 1706081 U JP1706081 U JP 1706081U JP S57131244 U JPS57131244 U JP S57131244U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1706081U JPS57131244U (ko) | 1981-02-09 | 1981-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1706081U JPS57131244U (ko) | 1981-02-09 | 1981-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57131244U true JPS57131244U (ko) | 1982-08-16 |
Family
ID=29815031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1706081U Pending JPS57131244U (ko) | 1981-02-09 | 1981-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57131244U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010131581A1 (ja) * | 2009-05-12 | 2010-11-18 | シャープ株式会社 | 基板洗浄方法および基板洗浄装置 |
| WO2020246183A1 (ja) * | 2019-06-04 | 2020-12-10 | Ｐｒｉｍｅｔａｌｓ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｊａｐａｎ株式会社 | 被膜除去装置、被膜除去方法、および接合装置 |
-
1981
- 1981-02-09 JP JP1706081U patent/JPS57131244U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010131581A1 (ja) * | 2009-05-12 | 2010-11-18 | シャープ株式会社 | 基板洗浄方法および基板洗浄装置 |
| WO2020246183A1 (ja) * | 2019-06-04 | 2020-12-10 | Ｐｒｉｍｅｔａｌｓ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｊａｐａｎ株式会社 | 被膜除去装置、被膜除去方法、および接合装置 |
| WO2020245913A1 (ja) * | 2019-06-04 | 2020-12-10 | Ｐｒｉｍｅｔａｌｓ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｊａｐａｎ株式会社 | 被膜除去装置、被膜除去方法、接合装置および接合方法 |
| JPWO2020246183A1 (ja) * | 2019-06-04 | 2021-10-28 | Ｐｒｉｍｅｔａｌｓ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｊａｐａｎ株式会社 | 被膜除去装置、被膜除去方法、および接合装置 |