JPS57128142U - - Google Patents

Info

Publication number
JPS57128142U
JPS57128142U JP1233681U JP1233681U JPS57128142U JP S57128142 U JPS57128142 U JP S57128142U JP 1233681 U JP1233681 U JP 1233681U JP 1233681 U JP1233681 U JP 1233681U JP S57128142 U JPS57128142 U JP S57128142U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1233681U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1233681U priority Critical patent/JPS57128142U/ja
Publication of JPS57128142U publication Critical patent/JPS57128142U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)
JP1233681U 1981-02-02 1981-02-02 Pending JPS57128142U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1233681U JPS57128142U (US20110009641A1-20110113-C00185.png) 1981-02-02 1981-02-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1233681U JPS57128142U (US20110009641A1-20110113-C00185.png) 1981-02-02 1981-02-02

Publications (1)

Publication Number Publication Date
JPS57128142U true JPS57128142U (US20110009641A1-20110113-C00185.png) 1982-08-10

Family

ID=29810451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1233681U Pending JPS57128142U (US20110009641A1-20110113-C00185.png) 1981-02-02 1981-02-02

Country Status (1)

Country Link
JP (1) JPS57128142U (US20110009641A1-20110113-C00185.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置
JPS62147734A (ja) * 1985-12-23 1987-07-01 Toyo Setsubi Kogyo Kk ウエハのエツチング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置
JPS62147734A (ja) * 1985-12-23 1987-07-01 Toyo Setsubi Kogyo Kk ウエハのエツチング装置

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