JPS57127688A - Carrier for pellet - Google Patents

Carrier for pellet

Info

Publication number
JPS57127688A
JPS57127688A JP1297081A JP1297081A JPS57127688A JP S57127688 A JPS57127688 A JP S57127688A JP 1297081 A JP1297081 A JP 1297081A JP 1297081 A JP1297081 A JP 1297081A JP S57127688 A JPS57127688 A JP S57127688A
Authority
JP
Japan
Prior art keywords
pellet
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1297081A
Other languages
Japanese (ja)
Inventor
Tatsuharu Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1297081A priority Critical patent/JPS57127688A/en
Publication of JPS57127688A publication Critical patent/JPS57127688A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP1297081A 1981-02-02 1981-02-02 Carrier for pellet Pending JPS57127688A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1297081A JPS57127688A (en) 1981-02-02 1981-02-02 Carrier for pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1297081A JPS57127688A (en) 1981-02-02 1981-02-02 Carrier for pellet

Publications (1)

Publication Number Publication Date
JPS57127688A true JPS57127688A (en) 1982-08-07

Family

ID=11820082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1297081A Pending JPS57127688A (en) 1981-02-02 1981-02-02 Carrier for pellet

Country Status (1)

Country Link
JP (1) JPS57127688A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01175523U (en) * 1988-06-01 1989-12-14
JP2021118323A (en) * 2020-01-29 2021-08-10 Hoya株式会社 Electrostatic Chuck Cleaner and Cleaning Method for Electrostatic Chuck

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01175523U (en) * 1988-06-01 1989-12-14
JPH0518894Y2 (en) * 1988-06-01 1993-05-19
JP2021118323A (en) * 2020-01-29 2021-08-10 Hoya株式会社 Electrostatic Chuck Cleaner and Cleaning Method for Electrostatic Chuck

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