JPS57124245A - Filter means in apparatus used for analyzing x rays radiation from material sample - Google Patents

Filter means in apparatus used for analyzing x rays radiation from material sample

Info

Publication number
JPS57124245A
JPS57124245A JP19781581A JP19781581A JPS57124245A JP S57124245 A JPS57124245 A JP S57124245A JP 19781581 A JP19781581 A JP 19781581A JP 19781581 A JP19781581 A JP 19781581A JP S57124245 A JPS57124245 A JP S57124245A
Authority
JP
Japan
Prior art keywords
analyzing
apparatus used
filter means
material sample
rays radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19781581A
Other languages
Japanese (ja)
Inventor
Furanshisu Berii Piitaa
Deiin Miraa Buendouru
Rindousei Neseri Jiyunia Jiyon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RAMUSHII ENG CO
Original Assignee
RAMUSHII ENG CO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RAMUSHII ENG CO filed Critical RAMUSHII ENG CO
Publication of JPS57124245A publication Critical patent/JPS57124245A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Inverter Devices (AREA)
  • Electronic Switches (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP19781581A 1980-12-15 1981-12-10 Filter means in apparatus used for analyzing x rays radiation from material sample Pending JPS57124245A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US21622680A 1980-12-15 1980-12-15

Publications (1)

Publication Number Publication Date
JPS57124245A true JPS57124245A (en) 1982-08-03

Family

ID=22806261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19781581A Pending JPS57124245A (en) 1980-12-15 1981-12-10 Filter means in apparatus used for analyzing x rays radiation from material sample

Country Status (3)

Country Link
JP (1) JPS57124245A (en)
DE (1) DE3149736A1 (en)
GB (1) GB2089499A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8725741D0 (en) * 1987-11-03 1987-12-09 Secretary Trade Ind Brit Control of pyrometallurgical processes
GB9317371D0 (en) * 1993-08-20 1993-10-06 Oxford Analytical Instr Ltd X-ray fluorescence inspection apparatus
US9176080B2 (en) 2011-07-19 2015-11-03 Olympus Ndt, Inc. X-ray analysis apparatus with detector window protection feature
DE102016106119B4 (en) * 2016-04-04 2019-03-07 mi2-factory GmbH Energy filter element for ion implantation systems for use in the production of wafers

Also Published As

Publication number Publication date
GB2089499A (en) 1982-06-23
DE3149736A1 (en) 1982-07-29

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