JPS57121666U - - Google Patents
Info
- Publication number
- JPS57121666U JPS57121666U JP363381U JP363381U JPS57121666U JP S57121666 U JPS57121666 U JP S57121666U JP 363381 U JP363381 U JP 363381U JP 363381 U JP363381 U JP 363381U JP S57121666 U JPS57121666 U JP S57121666U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981003633U JPS6333952Y2 (https=) | 1981-01-14 | 1981-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981003633U JPS6333952Y2 (https=) | 1981-01-14 | 1981-01-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57121666U true JPS57121666U (https=) | 1982-07-28 |
| JPS6333952Y2 JPS6333952Y2 (https=) | 1988-09-08 |
Family
ID=29802073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981003633U Expired JPS6333952Y2 (https=) | 1981-01-14 | 1981-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6333952Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011137596A (ja) * | 2009-12-28 | 2011-07-14 | Canon Anelva Corp | 真空熱処理装置および半導体デバイスの製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5920638A (ja) * | 1982-07-27 | 1984-02-02 | Nippon Sekisoo Kogyo Kk | 配設部材に取付け片を形成する方法 |
-
1981
- 1981-01-14 JP JP1981003633U patent/JPS6333952Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5920638A (ja) * | 1982-07-27 | 1984-02-02 | Nippon Sekisoo Kogyo Kk | 配設部材に取付け片を形成する方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011137596A (ja) * | 2009-12-28 | 2011-07-14 | Canon Anelva Corp | 真空熱処理装置および半導体デバイスの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6333952Y2 (https=) | 1988-09-08 |