JPS57121666U - - Google Patents

Info

Publication number
JPS57121666U
JPS57121666U JP363381U JP363381U JPS57121666U JP S57121666 U JPS57121666 U JP S57121666U JP 363381 U JP363381 U JP 363381U JP 363381 U JP363381 U JP 363381U JP S57121666 U JPS57121666 U JP S57121666U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP363381U
Other languages
Japanese (ja)
Other versions
JPS6333952Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981003633U priority Critical patent/JPS6333952Y2/ja
Publication of JPS57121666U publication Critical patent/JPS57121666U/ja
Application granted granted Critical
Publication of JPS6333952Y2 publication Critical patent/JPS6333952Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Furnace Details (AREA)
JP1981003633U 1981-01-14 1981-01-14 Expired JPS6333952Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981003633U JPS6333952Y2 (enrdf_load_stackoverflow) 1981-01-14 1981-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981003633U JPS6333952Y2 (enrdf_load_stackoverflow) 1981-01-14 1981-01-14

Publications (2)

Publication Number Publication Date
JPS57121666U true JPS57121666U (enrdf_load_stackoverflow) 1982-07-28
JPS6333952Y2 JPS6333952Y2 (enrdf_load_stackoverflow) 1988-09-08

Family

ID=29802073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981003633U Expired JPS6333952Y2 (enrdf_load_stackoverflow) 1981-01-14 1981-01-14

Country Status (1)

Country Link
JP (1) JPS6333952Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011137596A (ja) * 2009-12-28 2011-07-14 Canon Anelva Corp 真空熱処理装置および半導体デバイスの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920638A (ja) * 1982-07-27 1984-02-02 Nippon Sekisoo Kogyo Kk 配設部材に取付け片を形成する方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920638A (ja) * 1982-07-27 1984-02-02 Nippon Sekisoo Kogyo Kk 配設部材に取付け片を形成する方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011137596A (ja) * 2009-12-28 2011-07-14 Canon Anelva Corp 真空熱処理装置および半導体デバイスの製造方法

Also Published As

Publication number Publication date
JPS6333952Y2 (enrdf_load_stackoverflow) 1988-09-08

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