JPS57117696U - - Google Patents

Info

Publication number
JPS57117696U
JPS57117696U JP402681U JP402681U JPS57117696U JP S57117696 U JPS57117696 U JP S57117696U JP 402681 U JP402681 U JP 402681U JP 402681 U JP402681 U JP 402681U JP S57117696 U JPS57117696 U JP S57117696U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP402681U
Other languages
Japanese (ja)
Other versions
JPS6234479Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981004026U priority Critical patent/JPS6234479Y2/ja
Publication of JPS57117696U publication Critical patent/JPS57117696U/ja
Application granted granted Critical
Publication of JPS6234479Y2 publication Critical patent/JPS6234479Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Structure Of Printed Boards (AREA)
  • Lead Frames For Integrated Circuits (AREA)
JP1981004026U 1981-01-14 1981-01-14 Expired JPS6234479Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981004026U JPS6234479Y2 (cs) 1981-01-14 1981-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981004026U JPS6234479Y2 (cs) 1981-01-14 1981-01-14

Publications (2)

Publication Number Publication Date
JPS57117696U true JPS57117696U (cs) 1982-07-21
JPS6234479Y2 JPS6234479Y2 (cs) 1987-09-02

Family

ID=29802465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981004026U Expired JPS6234479Y2 (cs) 1981-01-14 1981-01-14

Country Status (1)

Country Link
JP (1) JPS6234479Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013015376A (ja) * 2011-07-01 2013-01-24 Tokyo Electron Ltd 基板処理装置のデータ取得方法及びセンサ用基板

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49113162A (cs) * 1973-03-06 1974-10-29
JPS5529274U (cs) * 1978-08-17 1980-02-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49113162A (cs) * 1973-03-06 1974-10-29
JPS5529274U (cs) * 1978-08-17 1980-02-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013015376A (ja) * 2011-07-01 2013-01-24 Tokyo Electron Ltd 基板処理装置のデータ取得方法及びセンサ用基板

Also Published As

Publication number Publication date
JPS6234479Y2 (cs) 1987-09-02

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