JPS57117238U - - Google Patents
Info
- Publication number
- JPS57117238U JPS57117238U JP471481U JP471481U JPS57117238U JP S57117238 U JPS57117238 U JP S57117238U JP 471481 U JP471481 U JP 471481U JP 471481 U JP471481 U JP 471481U JP S57117238 U JPS57117238 U JP S57117238U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP471481U JPS6113794Y2 (hu) | 1981-01-16 | 1981-01-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP471481U JPS6113794Y2 (hu) | 1981-01-16 | 1981-01-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57117238U true JPS57117238U (hu) | 1982-07-20 |
JPS6113794Y2 JPS6113794Y2 (hu) | 1986-04-28 |
Family
ID=29803119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP471481U Expired JPS6113794Y2 (hu) | 1981-01-16 | 1981-01-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6113794Y2 (hu) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8836929B2 (en) | 2002-12-20 | 2014-09-16 | Carl Zeiss Smt Gmbh | Device and method for the optical measurement of an optical system by using an immersion fluid |
US8902401B2 (en) | 2006-05-09 | 2014-12-02 | Carl Zeiss Smt Gmbh | Optical imaging device with thermal attenuation |
US9104117B2 (en) | 2004-07-07 | 2015-08-11 | Bob Streefkerk | Lithographic apparatus having a liquid detection system |
US9429495B2 (en) | 2004-06-04 | 2016-08-30 | Carl Zeiss Smt Gmbh | System for measuring the image quality of an optical imaging system |
US9436095B2 (en) | 2004-01-20 | 2016-09-06 | Carl Zeiss Smt Gmbh | Exposure apparatus and measuring device for a projection lens |
-
1981
- 1981-01-16 JP JP471481U patent/JPS6113794Y2/ja not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8836929B2 (en) | 2002-12-20 | 2014-09-16 | Carl Zeiss Smt Gmbh | Device and method for the optical measurement of an optical system by using an immersion fluid |
US9436095B2 (en) | 2004-01-20 | 2016-09-06 | Carl Zeiss Smt Gmbh | Exposure apparatus and measuring device for a projection lens |
US9429495B2 (en) | 2004-06-04 | 2016-08-30 | Carl Zeiss Smt Gmbh | System for measuring the image quality of an optical imaging system |
US9104117B2 (en) | 2004-07-07 | 2015-08-11 | Bob Streefkerk | Lithographic apparatus having a liquid detection system |
US8902401B2 (en) | 2006-05-09 | 2014-12-02 | Carl Zeiss Smt Gmbh | Optical imaging device with thermal attenuation |
Also Published As
Publication number | Publication date |
---|---|
JPS6113794Y2 (hu) | 1986-04-28 |