JPS571138B2 - - Google Patents

Info

Publication number
JPS571138B2
JPS571138B2 JP6440877A JP6440877A JPS571138B2 JP S571138 B2 JPS571138 B2 JP S571138B2 JP 6440877 A JP6440877 A JP 6440877A JP 6440877 A JP6440877 A JP 6440877A JP S571138 B2 JPS571138 B2 JP S571138B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6440877A
Other languages
Japanese (ja)
Other versions
JPS53148988A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6440877A priority Critical patent/JPS53148988A/en
Publication of JPS53148988A publication Critical patent/JPS53148988A/en
Publication of JPS571138B2 publication Critical patent/JPS571138B2/ja
Granted legal-status Critical Current

Links

JP6440877A 1977-05-31 1977-05-31 Manufacture of semiconductor substrate Granted JPS53148988A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6440877A JPS53148988A (en) 1977-05-31 1977-05-31 Manufacture of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6440877A JPS53148988A (en) 1977-05-31 1977-05-31 Manufacture of semiconductor substrate

Publications (2)

Publication Number Publication Date
JPS53148988A JPS53148988A (en) 1978-12-26
JPS571138B2 true JPS571138B2 (en) 1982-01-09

Family

ID=13257440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6440877A Granted JPS53148988A (en) 1977-05-31 1977-05-31 Manufacture of semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS53148988A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57204150A (en) * 1981-06-10 1982-12-14 Fujitsu Ltd Manufacture of semiconductor device
JPS63314844A (en) * 1987-06-18 1988-12-22 Toshiba Corp Manufacture of semiconductor device
US4962064A (en) * 1988-05-12 1990-10-09 Advanced Micro Devices, Inc. Method of planarization of topologies in integrated circuit structures
US4954459A (en) * 1988-05-12 1990-09-04 Advanced Micro Devices, Inc. Method of planarization of topologies in integrated circuit structures

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50107877A (en) * 1974-01-30 1975-08-25
JPS5226182A (en) * 1975-08-25 1977-02-26 Hitachi Ltd Manufacturing method of semi-conductor unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50107877A (en) * 1974-01-30 1975-08-25
JPS5226182A (en) * 1975-08-25 1977-02-26 Hitachi Ltd Manufacturing method of semi-conductor unit

Also Published As

Publication number Publication date
JPS53148988A (en) 1978-12-26

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