JPS571138B2 - - Google Patents
Info
- Publication number
- JPS571138B2 JPS571138B2 JP6440877A JP6440877A JPS571138B2 JP S571138 B2 JPS571138 B2 JP S571138B2 JP 6440877 A JP6440877 A JP 6440877A JP 6440877 A JP6440877 A JP 6440877A JP S571138 B2 JPS571138 B2 JP S571138B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6440877A JPS53148988A (en) | 1977-05-31 | 1977-05-31 | Manufacture of semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6440877A JPS53148988A (en) | 1977-05-31 | 1977-05-31 | Manufacture of semiconductor substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53148988A JPS53148988A (en) | 1978-12-26 |
JPS571138B2 true JPS571138B2 (en) | 1982-01-09 |
Family
ID=13257440
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6440877A Granted JPS53148988A (en) | 1977-05-31 | 1977-05-31 | Manufacture of semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53148988A (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57204150A (en) * | 1981-06-10 | 1982-12-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS63314844A (en) * | 1987-06-18 | 1988-12-22 | Toshiba Corp | Manufacture of semiconductor device |
US4962064A (en) * | 1988-05-12 | 1990-10-09 | Advanced Micro Devices, Inc. | Method of planarization of topologies in integrated circuit structures |
US4954459A (en) * | 1988-05-12 | 1990-09-04 | Advanced Micro Devices, Inc. | Method of planarization of topologies in integrated circuit structures |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50107877A (en) * | 1974-01-30 | 1975-08-25 | ||
JPS5226182A (en) * | 1975-08-25 | 1977-02-26 | Hitachi Ltd | Manufacturing method of semi-conductor unit |
-
1977
- 1977-05-31 JP JP6440877A patent/JPS53148988A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50107877A (en) * | 1974-01-30 | 1975-08-25 | ||
JPS5226182A (en) * | 1975-08-25 | 1977-02-26 | Hitachi Ltd | Manufacturing method of semi-conductor unit |
Also Published As
Publication number | Publication date |
---|---|
JPS53148988A (en) | 1978-12-26 |