JPS5711228Y2 - - Google Patents
Info
- Publication number
- JPS5711228Y2 JPS5711228Y2 JP3361575U JP3361575U JPS5711228Y2 JP S5711228 Y2 JPS5711228 Y2 JP S5711228Y2 JP 3361575 U JP3361575 U JP 3361575U JP 3361575 U JP3361575 U JP 3361575U JP S5711228 Y2 JPS5711228 Y2 JP S5711228Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Spectrometry And Color Measurement (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361575U JPS5711228Y2 (sh) | 1975-03-14 | 1975-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361575U JPS5711228Y2 (sh) | 1975-03-14 | 1975-03-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51115066U JPS51115066U (sh) | 1976-09-18 |
| JPS5711228Y2 true JPS5711228Y2 (sh) | 1982-03-05 |
Family
ID=28146848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3361575U Expired JPS5711228Y2 (sh) | 1975-03-14 | 1975-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5711228Y2 (sh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2791038B2 (ja) * | 1988-06-24 | 1998-08-27 | 株式会社日立製作所 | 分光器及びそれを用いた投影露光装置並びに投影露光方法 |
| WO2024143124A1 (ja) * | 2022-12-28 | 2024-07-04 | 株式会社堀場製作所 | 分光分析装置及び分光分析方法 |
-
1975
- 1975-03-14 JP JP3361575U patent/JPS5711228Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51115066U (sh) | 1976-09-18 |